Issued Patents All Time
Showing 26–40 of 40 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7640071 | Method of achieving high productivity fault tolerant photovoltaic factory with batch array transfer robots | — | 2009-12-29 |
| 7572334 | Apparatus for fabricating large-surface area polycrystalline silicon sheets for solar cell application | Arnold Kholodenko, Mark Mandelboym | 2009-08-11 |
| 7569462 | Directional crystallization of silicon sheets using rapid thermal processing | Virendra V. Rana | 2009-08-04 |
| 7496423 | Method of achieving high productivity fault tolerant photovoltaic factory with batch array transfer robots | — | 2009-02-24 |
| 7052622 | Method for measuring etch rates during a release process | Jeffrey D. Chinn | 2006-05-30 |
| 7037854 | Method for chemical-mechanical jet etching of semiconductor structures | Jeffrey D. Chinn | 2006-05-02 |
| 7029529 | Method and apparatus for metallization of large area substrates | Kam S. Law, John M. White, Quanyuan Shang | 2006-04-18 |
| 6896513 | Large area substrate processing system | Wendell T. Blonigan | 2005-05-24 |
| 6887776 | Methods to form metal lines using selective electrochemical deposition | Quanyuan Shang, John M. White, Kam S. Law | 2005-05-03 |
| 6818529 | Apparatus and method for forming a silicon film across the surface of a glass substrate | Kam S. Law | 2004-11-16 |
| 6699356 | Method and apparatus for chemical-mechanical jet etching of semiconductor structures | Jeffrey D. Chinn | 2004-03-02 |
| 6698991 | Fabrication system with extensible equipment sets | John Christopher Moran | 2004-03-02 |
| 6605319 | Use of integrated polygen deposition and RTP for microelectromechanical systems | Jeffrey D. Chinn, Yi-Hsing Chen, John Christopher Moran | 2003-08-12 |
| 6540466 | Compact apparatus and method for storing and loading semiconductor wafer carriers | — | 2003-04-01 |
| 5957648 | Factory automation apparatus and method for handling, moving and storing semiconductor wafer carriers | — | 1999-09-28 |