Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6248250 | RF plasma reactor with hybrid conductor and multi-radius dome ceiling | Hiroji Hanawa, Gerald Yin, Diana Xiaobing Ma, Peter Loewenhardt, Allen Zhao | 2001-06-19 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6248250 | RF plasma reactor with hybrid conductor and multi-radius dome ceiling | Hiroji Hanawa, Gerald Yin, Diana Xiaobing Ma, Peter Loewenhardt, Allen Zhao | 2001-06-19 |