Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8871064 | Electromagnet array in a sputter reactor | Tza-Jing Gung, Xinyu Fu, Arvind Sundarrajan, Edward P. Hammond, IV, Praburam Gopalraja +2 more | 2014-10-28 |
| 7686926 | Multi-step process for forming a metal barrier in a sputter reactor | Tza-Jing Gung, Xinyu Fu, Arvind Sundarrajan, Edward P. Hammond, IV, Praburam Gopalraja +2 more | 2010-03-30 |
| 7527713 | Variable quadruple electromagnet array in plasma processing | Tza-Jing Gung, Andrew Gillard | 2009-05-05 |
| 6864773 | Variable field magnet apparatus | — | 2005-03-08 |
| 6846396 | Active magnetic shielding | — | 2005-01-25 |
| 6761804 | Inverted magnetron | — | 2004-07-13 |