Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6219219 | Cathode assembly containing an electrostatic chuck for retaining a wafer in a semiconductor wafer processing system | Gilbert Hausmann, Anantha K. Subramani, Peter Satitpunwaycha, Raymond Gristi, Bradley O. Stimson +2 more | 2001-04-17 |