Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6532715 | Semiconductor substrate processing tool and fabrications facilities integration plate | Glenn Lattig | 2003-03-18 |
| 5980194 | Wafer position error detection and correction system | Frederik W. Freerks, Lloyd M. Berken, M. Uenia Crithfield, David Schott, Michael R. Rice +4 more | 1999-11-09 |
| 5280983 | Semiconductor processing system with robotic autoloader and load lock | Dan Maydan, Sasson Somekh, Charles Ryan-Harris, Richard A. Seilheimer, David Cheng +5 more | 1994-01-25 |
| 5224809 | Semiconductor processing system with robotic autoloader and load lock | Dan Maydan, Sasson Somekh, Charles Ryan-Harris, Richard A. Seilheimer, David Cheng +5 more | 1993-07-06 |
| 4911597 | Semiconductor processing system with robotic autoloader and load lock | Dan Maydan, Sasson Somekh, Charles Ryan-Harris, Richard A. Seilheimer, David Cheng +5 more | 1990-03-27 |