Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6027606 | Center gas feed apparatus for a high density plasma reactor | Mei Chang, Raymond Hung, Kenneth S. Collins, Ru-Liang Lee | 2000-02-22 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6027606 | Center gas feed apparatus for a high density plasma reactor | Mei Chang, Raymond Hung, Kenneth S. Collins, Ru-Liang Lee | 2000-02-22 |