Issued Patents All Time
Showing 26–31 of 31 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9460932 | Surface poisoning using ALD for high selectivity deposition of high aspect ratio features | Paul F. Ma, Guodan Wei | 2016-10-04 |
| 9418890 | Method for tuning a deposition rate during an atomic layer deposition process | Paul F. Ma, Joseph AuBuchon, Mei Chang | 2016-08-16 |
| 9209074 | Cobalt deposition on barrier surfaces | Hyoung-Chan Ha, Paul F. Ma, Seshadri Ganguli, Joseph AuBuchon, Sang Ho Yu +1 more | 2015-12-08 |
| 9051641 | Cobalt deposition on barrier surfaces | Hyoung-Chan Ha, Paul F. Ma, Seshadri Ganguli, Joseph AuBuchon, Sang Ho Yu +1 more | 2015-06-09 |
| 8725283 | Generalized kinematics system | Paul J. Gray, Kishore Lankalapalli | 2014-05-13 |
| 7290723 | Aerosol splitter for ELSD | Samuel Frederick Azlein | 2007-11-06 |