Issued Patents All Time
Showing 26–39 of 39 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6818604 | System and method for cleaning workpieces | Yakov Epshteyn, Periya Gopalan, Guangshum Chen, Xingbo Yang | 2004-11-16 |
| 6802955 | Method and apparatus for the electrochemical deposition and planarization of a material on a workpiece surface | Periya Gopalan, Phillip M. Rayer, II, Bentley J. Palmer | 2004-10-12 |
| 6736952 | Method and apparatus for electrochemical planarization of a workpiece | Saket Chadda, Nikolay Korovin, Brian L. Mueller | 2004-05-18 |
| 6572755 | Method and apparatus for electrochemically depositing a material onto a workpiece surface | Saket Chadda, Nikolay Korovin, Brian L. Mueller | 2003-06-03 |
| 6337032 | Sol-gel precursor and method for formation of ferroelectric materials for integrated circuits | Vasanta Chivukula, Michael Sayer, David McDonald | 2002-01-08 |
| 6066581 | Sol-gel precursor and method for formation of ferroelectric materials for integrated circuits | Vasanta Chivukula, Michael Sayer, David McDonald | 2000-05-23 |
| 5789303 | Method of adding on chip capacitors to an integrated circuit | Pak K. Leung | 1998-08-04 |
| 5728603 | Method of forming a crystalline ferroelectric dielectric material for an integrated circuit | David McDonald, Vsanta Chivukula | 1998-03-17 |
| 5563762 | Capacitor for an integrated circuit and method of formation thereof, and a method of adding on-chip capacitors to an integrated circuit | Pak K. Leung | 1996-10-08 |
| 5452178 | Structure and method of making a capacitor for an intergrated circuit | Iain D. Calder, Vu Q. Ho, Gurvinder Jolly, Lynnette D. Madsen | 1995-09-19 |
| 5407698 | Deposition of tungsten | — | 1995-04-18 |
| 5358889 | Formation of ruthenium oxide for integrated circuits | David McDonald | 1994-10-25 |
| 5354712 | Method for forming interconnect structures for integrated circuits | Yu Q. Ho, Gurvinder Jolly | 1994-10-11 |
| 5330931 | Method of making a capacitor for an integrated circuit | Iain D. Calder, Vu Q. Ho, Gurvinder Jolly, Lynnette D. Madsen | 1994-07-19 |