Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12334318 | Plasma preclean system for cluster tool | Songjae Lee, Masato Ishii, Martin TRUEMPER, Richard O. Collins, Martin Jeffrey Salinas +5 more | 2025-06-17 |
| 7975718 | In-situ monitor of injection valve | Khai Ngo, Son T. Nguyen | 2011-07-12 |