| 9176048 |
Normal incidence broadband spectroscopic polarimeter and optical measurement system |
Guoguang Li, Tao Liu, Tiezhong Ma, Xiaolang Yan |
2015-11-03 |
| 9170156 |
Normal-incidence broadband spectroscopic polarimeter containing reference beam and optical measurement system |
Guoguang Li, Tao Liu, Jiangyan Zhao, Qingyang Guo, Tiezhong Ma +1 more |
2015-10-27 |
| 8767209 |
Broadband polarization spectrometer with inclined incidence and optical measurement system |
Guoguang Li, Tao Liu, Tiezhong Ma, Yan Xiaolang |
2014-07-01 |
| 8130373 |
Metrology of thin film devices using an addressable micromirror array |
Edward W. Budiarto |
2012-03-06 |
| 8027031 |
Spectrometric metrology of workpieces using a permanent window as a spectral reference |
Edward W. Budiarto |
2011-09-27 |
| 8018586 |
Metrology of thin film devices using an addressable micromirror array |
Edward W. Budiarto |
2011-09-13 |
| 7969568 |
Spectrographic metrology of patterned wafers |
James M. Holden, Todd Egan |
2011-06-28 |
| 7911603 |
Spectrometric metrology of workpieces using a permanent window as a spectral reference |
Edward W. Budiarto |
2011-03-22 |
| 7379185 |
Evaluation of openings in a dielectric layer |
Peter G. Borden, Jiping Li |
2008-05-27 |
| 7026175 |
High throughput measurement of via defects in interconnects |
Jiping Li, Peter G. Borden |
2006-04-11 |
