Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9176048 | Normal incidence broadband spectroscopic polarimeter and optical measurement system | Guoguang Li, Tao Liu, Tiezhong Ma, Xiaolang Yan | 2015-11-03 |
| 9170156 | Normal-incidence broadband spectroscopic polarimeter containing reference beam and optical measurement system | Guoguang Li, Tao Liu, Jiangyan Zhao, Qingyang Guo, Tiezhong Ma +1 more | 2015-10-27 |
| 8767209 | Broadband polarization spectrometer with inclined incidence and optical measurement system | Guoguang Li, Tao Liu, Tiezhong Ma, Yan Xiaolang | 2014-07-01 |
| 8130373 | Metrology of thin film devices using an addressable micromirror array | Edward W. Budiarto | 2012-03-06 |
| 8027031 | Spectrometric metrology of workpieces using a permanent window as a spectral reference | Edward W. Budiarto | 2011-09-27 |
| 8018586 | Metrology of thin film devices using an addressable micromirror array | Edward W. Budiarto | 2011-09-13 |
| 7969568 | Spectrographic metrology of patterned wafers | James M. Holden, Todd Egan | 2011-06-28 |
| 7911603 | Spectrometric metrology of workpieces using a permanent window as a spectral reference | Edward W. Budiarto | 2011-03-22 |
| 7379185 | Evaluation of openings in a dielectric layer | Peter G. Borden, Jiping Li | 2008-05-27 |
| 7026175 | High throughput measurement of via defects in interconnects | Jiping Li, Peter G. Borden | 2006-04-11 |