Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11682560 | Systems and methods for hafnium-containing film removal | Zhenjiang Cui, Hanshen Zhang | 2023-06-20 |
| 11121002 | Systems and methods for etching metals and metal derivatives | Zhenjiang Cui, Hanshen Zhang, Siliang Chang | 2021-09-14 |
| 10861676 | Metal recess for semiconductor structures | Zhenjiang Cui, Nitin K. Ingle, Feiyue Ma, Hanshen Zhang, Siliang Chang | 2020-12-08 |
| 10854426 | Metal recess for semiconductor structures | Zhenjiang Cui, Nitin K. Ingle, Feiyue Ma, Hanshen Zhang, Siliang Chang | 2020-12-01 |