Issued Patents All Time
Showing 26–28 of 28 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6296780 | System and method for etching organic anti-reflective coating from a substrate | Yan Ye, Diana Xiaobing Ma | 2001-10-02 |
| 6291356 | Method for etching silicon oxynitride and dielectric antireflection coatings | Pavel Ionov, Sung Ho Kim, Dean Li, James C. Wang | 2001-09-18 |
| 6080529 | Method of etching patterned layers useful as masking during subsequent etching or for damascene structures | Yan Ye, Pavel Ionov, Allen Zhao, Peter Hsieh, Diana Xiaobing Ma +1 more | 2000-06-27 |