Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11794302 | Compensation for slurry composition in in-situ electromagnetic inductive monitoring | Kun Xu | 2023-10-24 |
| 11597052 | Temperature control of chemical mechanical polishing | Hari Soundararajan, Shou-Sung Chang, Haosheng Wu, Jianshe Tang, Jeonghoon Oh +1 more | 2023-03-07 |