Issued Patents All Time
Showing 26–30 of 30 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6589889 | Contact planarization using nanoporous silica materials | James Drage | 2003-07-08 |
| 6565920 | Edge bead removal for spin-on materials containing low volatility solvents fusing carbon dioxide cleaning | — | 2003-05-20 |
| 6444495 | Dielectric films for narrow gap-fill applications | Roger Leung, Songyuan Xie, Nigel Hacker, Yanpei Deng | 2002-09-03 |
| 6407006 | Method for integrated circuit planarization | Joseph Levert, Daniel Towery | 2002-06-18 |
| 6140254 | Edge bead removal for nanoporous dielectric silica coatings | Hui-Jung Wu, Teresa Ramos | 2000-10-31 |