Issued Patents All Time
Showing 26–35 of 35 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8749036 | Microchip with blocking apparatus and method of fabricating microchip | Li Chen, Thomas Kieran Nunan | 2014-06-10 |
| 8616056 | BAW gyroscope with bottom electrode | Firas Sammoura | 2013-12-31 |
| 8590136 | Method of fabricating a dual single-crystal backplate microphone | Li Chen, Thomas Chen | 2013-11-26 |
| 8507306 | Reduced stiction MEMS device with exposed silicon carbide | Li Chen, Christine H. Tsau, Thomas Kieran Nunan | 2013-08-13 |
| 8455288 | Method for etching material longitudinally spaced from etch mask | Thomas Chen | 2013-06-04 |
| 8438923 | MEMS device with opposite polarity spring bimorph | Firas Sammoura | 2013-05-14 |
| 8267486 | Apparatus and method of detecting microchip hermeticity | Firas Sammoura | 2012-09-18 |
| 8215151 | MEMS stiction testing apparatus and method | Firas Sammoura, William D. Sawyer | 2012-07-10 |
| 8058144 | Method for capping a MEMS wafer | Milind S. Bhagavat, Erik Tarvin, Firas Sammoura, Andrew Sparks | 2011-11-15 |
| 5006421 | Metalization systems for heater/sensor elements | David J. Gutierrez, George E. Gimpelson | 1991-04-09 |