Issued Patents All Time
Showing 26–33 of 33 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6159794 | Methods for removing silicide residue in a semiconductor device | Lewis Shen | 2000-12-12 |
| 6159860 | Method for etching layers on a semiconductor wafer in a single etching chamber | Lewis Shen | 2000-12-12 |
| 6136649 | Method for removing anti-reflective coating layer using plasma etch process after contact CMP | Angela T. Hui, Kashmir Sahota, Mark T. Ramsbey, Suzette K. Pangrle, Minh Van Ngo | 2000-10-24 |
| 6110779 | Method and structure of etching a memory cell polysilicon gate layer using resist mask and etched silicon oxynitride | Lewis Shen | 2000-08-29 |
| 6074956 | Method for preventing silicide residue formation in a semiconductor device | Lewis Shen | 2000-06-13 |
| 5977601 | Method for etching memory gate stack using thin resist layer | Lewis Shen | 1999-11-02 |
| 5973353 | Methods and arrangements for forming a tapered floating gate in non-volatile memory semiconductor devices | Lewis Shen | 1999-10-26 |
| 5948703 | Method of soft-landing gate etching to prevent gate oxide damage | Lewis Shen | 1999-09-07 |