Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7326646 | Nitrogen-free ARC layer and a method of manufacturing the same | Hartmut Ruelke, Katja Huy | 2008-02-05 |
| 7314824 | Nitrogen-free ARC/capping layer and method of manufacturing the same | Kai Frohberg, Hartmut Ruelke | 2008-01-01 |