Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6900139 | Method for photoresist trim endpoint detection | Srikanteswara Dakshina-Murthy, Douglas J. Bonser | 2005-05-31 |
| 6337217 | Method and apparatus for improved focus in optical processing | Frederick N. Hause | 2002-01-08 |