Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6746973 | Effect of substrate surface treatment on 193 NM resist processing | Catherine B. Labelle, Ramkumar Subramanian, Jacques Bertrand | 2004-06-08 |
| 6191030 | Anti-reflective coating layer for semiconductor device | Ramkumar Subramanian, Suzette K. Pangrle, John G. Pellerin | 2001-02-20 |
| 5986344 | Anti-reflective coating layer for semiconductor device | Ramkumar Subramanion, Suzette K. Pangrle, John G. Pellerin | 1999-11-16 |