Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6746972 | Apparatus for and method of heat-treating a wafer | Sung-Il Jang, Kyung Seo Park, Ki Hyon Chyun, Hee Sun Chab | 2004-06-08 |
| 5874128 | Method and apparatus for uniformly spin-coating a photoresist material | — | 1999-02-23 |
| 5872365 | UV irradiation apparatus | Kyoon-hee Goh, Chul-hui Kim, Byung-Kwan Lee, Seung-ug Kim, In-hyub Park +5 more | 1999-02-16 |