Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10711227 | TiN hard mask and etch residue removal | Wen Dar Liu, Yi-Chia Lee, William Jack Casteel, Jr., Tianniu Chen, Madhukar Bhaskara Rao | 2020-07-14 |
| 10073351 | Semi-aqueous photoresist or semiconductor manufacturing residue stripping and cleaning composition with improved silicon passivation | Mark Richard Brown, Aiping Wu, David Barry Rennie, Yi-Chia Lee, Gene Everad Parris | 2018-09-11 |
| 9976111 | TiN hard mask and etch residual removal | Wen Dar Liu, Yi-Chia Lee, William Jack Casteel, Jr., Tianniu Chen, Madhukar Bhaskara Rao | 2018-05-22 |
| 9463978 | Process for making trisilylamine | Sai-Hong Andrew Lo, Howard Paul Withers, Jr., Joseph T. Sluzevich, James Joseph Hart | 2016-10-11 |
| 9284198 | Process for making trisilylamine | Sai-Hong Andrew Lo, Howard Paul Withers, Jr., Joseph T. Sluzevich, James Joseph Hart | 2016-03-15 |
| 8206676 | Method for making a chlorosilane | John Francis Lehmann, Charles G. Coe, Daniel Joseph Tempel | 2012-06-26 |
| 7250072 | Removal of sulfur-containing impurities from volatile metal hydrides | George L. Ryals, Wei Cao, John Frederick Cirucci, Robert W. Apollo, Daniel McNesby | 2007-07-31 |
| 6963006 | Process for the production and purification of bis(tertiary-butylamino)silane | Yin Pang Tsui, Thomas Elwood Zellner, Ravi Laxman | 2005-11-08 |