Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7476951 | Selective isotropic etch for titanium-based materials | Daniel Chesire, Kelly Hinckley, Gregory A. Head, Benu B. Patel | 2009-01-13 |
| 7157375 | Methods of downstream microwave photoresist removal and via clean, particularly following Stop-On TiN etching | Kelly Hinckley, Paul B. Murphey, Daniel M. Oman, Paul Wheeler | 2007-01-02 |
| 7078337 | Selective isotropic etch for titanium-based materials | Daniel Chesire, Kelly Hinckley, Gregory A. Head, Benu B. Patel | 2006-07-18 |
| 6451660 | Method of forming bipolar transistors comprising a native oxide layer formed on a substrate by rinsing the substrate in ozonated water | Yi Ma, Yih-Feng Chyan, Chung Wai Leung, Jane Qian Liu | 2002-09-17 |