Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7157375 | Methods of downstream microwave photoresist removal and via clean, particularly following Stop-On TiN etching | Timothy Campbell, Kelly Hinckley, Paul B. Murphey, Paul Wheeler | 2007-01-02 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7157375 | Methods of downstream microwave photoresist removal and via clean, particularly following Stop-On TiN etching | Timothy Campbell, Kelly Hinckley, Paul B. Murphey, Paul Wheeler | 2007-01-02 |