Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7476951 | Selective isotropic etch for titanium-based materials | Timothy Campbell, Daniel Chesire, Gregory A. Head, Benu B. Patel | 2009-01-13 |
| 7157375 | Methods of downstream microwave photoresist removal and via clean, particularly following Stop-On TiN etching | Timothy Campbell, Paul B. Murphey, Daniel M. Oman, Paul Wheeler | 2007-01-02 |
| 7078337 | Selective isotropic etch for titanium-based materials | Timothy Campbell, Daniel Chesire, Gregory A. Head, Benu B. Patel | 2006-07-18 |