Issued Patents All Time
Showing 26–35 of 35 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11037804 | Methods and apparatus for cleaning substrates | Hui Wang, Xi Wang, Fufa Chen, Jian Wang, Xiaoyan Zhang +4 more | 2021-06-15 |
| 11000782 | Method and apparatus for cleaning substrates using high temperature chemicals and ultrasonic device | Hui Wang, Xi Wang, Shena Jia, Danying Wang, Chaowei Jiang +2 more | 2021-05-11 |
| 10910244 | Methods and system for cleaning semiconductor wafers | Hui Wang, Fufa Chen, Jian Wang, Xi Wang, Xiaoyan Zhang +5 more | 2021-02-02 |
| 10907266 | Method and apparatus for uniformly metallization on substrate | Hui Wang, Xi Wang | 2021-02-02 |
| 10816901 | Coater with automatic cleaning function and coater automatic cleaning method | Hui Wang, Wenjun Wang, Hongchao Yang, Voha Nuch, Fufa Chen +3 more | 2020-10-27 |
| 10770335 | Substrate supporting apparatus | Fufa Chen, Zhiyou Fang, Jun Wu, Hui Wang, Wenjun Wang | 2020-09-08 |
| 10770315 | Fall-proof apparatus for cleaning semiconductor devices and a chamber with the apparatus | Zhenming Chu, Xi Wang, Hui Wang, Shena Jia, Jun Wu +1 more | 2020-09-08 |
| 10410906 | Substrate supporting apparatus | Hui Wang, Huaidong ZHANG, Wenjun Wang | 2019-09-10 |
| 10297472 | Method and apparatus for cleaning semiconductor wafer | Hui Wang, Liangzhi Xie, Shena Jia, Xi Wang, Xiaoyan Zhang | 2019-05-21 |
| 10113244 | Method and apparatus for uniformly metallization on substrate | Hui Wang, Xi Wang | 2018-10-30 |