FC

Fuping Chen

A( Acm Research (Shanghai): 30 patents #3 of 43Top 7%
AR Acm Research: 5 patents #2 of 14Top 15%
Overall (All Time): #95,223 of 4,157,543Top 3%
35
Patents All Time

Issued Patents All Time

Showing 26–35 of 35 patents

Patent #TitleCo-InventorsDate
11037804 Methods and apparatus for cleaning substrates Hui Wang, Xi Wang, Fufa Chen, Jian Wang, Xiaoyan Zhang +4 more 2021-06-15
11000782 Method and apparatus for cleaning substrates using high temperature chemicals and ultrasonic device Hui Wang, Xi Wang, Shena Jia, Danying Wang, Chaowei Jiang +2 more 2021-05-11
10910244 Methods and system for cleaning semiconductor wafers Hui Wang, Fufa Chen, Jian Wang, Xi Wang, Xiaoyan Zhang +5 more 2021-02-02
10907266 Method and apparatus for uniformly metallization on substrate Hui Wang, Xi Wang 2021-02-02
10816901 Coater with automatic cleaning function and coater automatic cleaning method Hui Wang, Wenjun Wang, Hongchao Yang, Voha Nuch, Fufa Chen +3 more 2020-10-27
10770335 Substrate supporting apparatus Fufa Chen, Zhiyou Fang, Jun Wu, Hui Wang, Wenjun Wang 2020-09-08
10770315 Fall-proof apparatus for cleaning semiconductor devices and a chamber with the apparatus Zhenming Chu, Xi Wang, Hui Wang, Shena Jia, Jun Wu +1 more 2020-09-08
10410906 Substrate supporting apparatus Hui Wang, Huaidong ZHANG, Wenjun Wang 2019-09-10
10297472 Method and apparatus for cleaning semiconductor wafer Hui Wang, Liangzhi Xie, Shena Jia, Xi Wang, Xiaoyan Zhang 2019-05-21
10113244 Method and apparatus for uniformly metallization on substrate Hui Wang, Xi Wang 2018-10-30