Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12334367 | Method and apparatus for removing particles or photoresist on substrates | Xiaoyan Zhang, Wenjun Wang, Fuping Chen, Jun Wang, Deyun Wang +3 more | 2025-06-17 |
| 12186684 | Method and apparatus for cleaning substrates using high temperature chemicals and ultrasonic device | Fuping Chen, Hui Wang, Xi Wang, Danying Wang, Chaowei Jiang +2 more | 2025-01-07 |
| 11925881 | Method and apparatus for cleaning substrates using high temperature chemicals and ultrasonic device | Fuping Chen, Hui Wang, Xi Wang, Danying Wang, Chaowei Jiang +2 more | 2024-03-12 |
| 11498100 | Apparatus for cleaning semiconductor substrates | Hui Wang, Xiaofeng Tao, Fuping Chen, Xi Wang, Xiaoyan Zhang +1 more | 2022-11-15 |
| 11462423 | Method and apparatus for cleaning semiconductor wafer | Hui Wang, Fuping Chen, Liangzhi Xie, Xi Wang, Xiaoyan Zhang | 2022-10-04 |
| 11000782 | Method and apparatus for cleaning substrates using high temperature chemicals and ultrasonic device | Fuping Chen, Hui Wang, Xi Wang, Danying Wang, Chaowei Jiang +2 more | 2021-05-11 |
| 10770315 | Fall-proof apparatus for cleaning semiconductor devices and a chamber with the apparatus | Zhenming Chu, Xi Wang, Hui Wang, Jun Wu, Fuping Chen +1 more | 2020-09-08 |
| 10297472 | Method and apparatus for cleaning semiconductor wafer | Hui Wang, Fuping Chen, Liangzhi Xie, Xi Wang, Xiaoyan Zhang | 2019-05-21 |