ZC

Zhenming Chu

A( Acm Research (Shanghai): 2 patents #29 of 43Top 70%
Overall (All Time): #1,840,858 of 4,157,543Top 45%
2
Patents All Time

Issued Patents All Time

Showing 1–2 of 2 patents

Patent #TitleCo-InventorsDate
11298727 Substrate cleaning apparatus Hui Wang, Jun Wu, Cheng-Liang Cheng, Xi Wang 2022-04-12
10770315 Fall-proof apparatus for cleaning semiconductor devices and a chamber with the apparatus Xi Wang, Hui Wang, Shena Jia, Jun Wu, Fuping Chen +1 more 2020-09-08