Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12392026 | Method and device for substrate processing | Tamaki Takeyama, Hiroaki Chihaya, Motoi YAMAGATA, Manabu Nakagawasai | 2025-08-19 |
| 12394656 | Mounting table and substrate processing apparatus | Katsuyoshi Aikawa, Hiroshi Sone | 2025-08-19 |