Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12394656 | Mounting table and substrate processing apparatus | Katsuyoshi Aikawa, Shinji Orimoto | 2025-08-19 |
| 12315707 | Mounting table structure, substrate processing apparatus, and method of controlling substrate processing apparatus | Motoi YAMAGATA, Masato SHINADA | 2025-05-27 |