Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12315707 | Mounting table structure, substrate processing apparatus, and method of controlling substrate processing apparatus | Motoi YAMAGATA, Hiroshi Sone | 2025-05-27 |
| 12261078 | Processing method and processing apparatus | Takuya UMISE, Tetsuya Miyashita | 2025-03-25 |