Issued Patents 2025
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12327744 | Substrate transfer device and substrate processing system | Tatsuo Hatano, Naoki Watanabe, Naoyuki Suzuki | 2025-06-10 |
| 12261078 | Processing method and processing apparatus | Takuya UMISE, Masato SHINADA | 2025-03-25 |
| 12211720 | Vacuum transfer device, substrate processing system, and substrate processing method | Tatsuo Hatano, Naoki Watanabe | 2025-01-28 |