Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12392026 | Method and device for substrate processing | Hiroaki Chihaya, Motoi YAMAGATA, Manabu Nakagawasai, Shinji Orimoto | 2025-08-19 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12392026 | Method and device for substrate processing | Hiroaki Chihaya, Motoi YAMAGATA, Manabu Nakagawasai, Shinji Orimoto | 2025-08-19 |