Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12392026 | Method and device for substrate processing | Tamaki Takeyama, Motoi YAMAGATA, Manabu Nakagawasai, Shinji Orimoto | 2025-08-19 |
| 12387922 | Film forming apparatus, processing condition determination method, and film forming method | Kenichi Imakita, Toru Kitada, Atsushi Gomi | 2025-08-12 |