Issued Patents 2025
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12392026 | Method and device for substrate processing | Tamaki Takeyama, Hiroaki Chihaya, Motoi YAMAGATA, Shinji Orimoto | 2025-08-19 |
| 12362155 | Substrate processing apparatus, temperature control method of substrate processing apparatus, and program of control device for controlling substrate processing apparatus | Toshiharu Hirata, Takashi Ishii, Keiichi Iobe | 2025-07-15 |
| 12211706 | Substrate processing device and method of manufacturing substrate processing device | Satoshi Takeda | 2025-01-28 |