Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12362155 | Substrate processing apparatus, temperature control method of substrate processing apparatus, and program of control device for controlling substrate processing apparatus | Toshiharu Hirata, Manabu Nakagawasai, Takashi Ishii | 2025-07-15 |