Issued Patents 2025
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12317419 | Apparatus for temperature measurement and method of processing substrate | Yong Jun SEO, Su Jin CHAE, Dong Ok AHN | 2025-05-27 |
| 12240259 | Substrate processing device and control method for substrate processing device | Sang Min HA, Hyeong Jun CHO, Jae Hong Kim, Young-joo Seo | 2025-03-04 |
| 12235663 | Apparatus for controlling flow rate and method of controlling flow rate | Myung Hwan Eom, Jae Hong Kim | 2025-02-25 |
| 12224189 | Substrate type sensor and method of measuring the impact point and the impact force of chemical | Young Seop CHOI, Yong Jun SEO, Jun Gwon Lee, Hak Hyon Kim, Sun-Yong Park | 2025-02-11 |