Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12240259 | Substrate processing device and control method for substrate processing device | Hyeong Jun CHO, Jae Hong Kim, Sang Hyun SON, Young-joo Seo | 2025-03-04 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12240259 | Substrate processing device and control method for substrate processing device | Hyeong Jun CHO, Jae Hong Kim, Sang Hyun SON, Young-joo Seo | 2025-03-04 |