Issued Patents 2025
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12311415 | Substrate processing apparatus and substrate processing method | Do Hyung Kim, Dae Hun Kim, Young Jin Kim, Tae Ho KANG, Young Joon HAN +1 more | 2025-05-27 |
| 12224189 | Substrate type sensor and method of measuring the impact point and the impact force of chemical | Young Seop CHOI, Yong Jun SEO, Sang Hyun SON, Hak Hyon Kim, Sun-Yong Park | 2025-02-11 |