Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12317419 | Apparatus for temperature measurement and method of processing substrate | Sang Hyun SON, Su Jin CHAE, Dong Ok AHN | 2025-05-27 |
| 12224189 | Substrate type sensor and method of measuring the impact point and the impact force of chemical | Young Seop CHOI, Sang Hyun SON, Jun Gwon Lee, Hak Hyon Kim, Sun-Yong Park | 2025-02-11 |