Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12317419 | Apparatus for temperature measurement and method of processing substrate | Yong Jun SEO, Sang Hyun SON, Dong Ok AHN | 2025-05-27 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12317419 | Apparatus for temperature measurement and method of processing substrate | Yong Jun SEO, Sang Hyun SON, Dong Ok AHN | 2025-05-27 |