Issued Patents 2025
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12374519 | Wafer positioning method and apparatus | Chia-Cheng Chen, Liang-Yin Chen, Huicheng Chang, Yee-Chia Yeo | 2025-07-29 |
| 12322643 | Height adjustable semiconductor wafer support | Ming Shing, Yichi YEN, Kuo Lun Lo | 2025-06-03 |
| 12205855 | Process tool for analyzing bonded workpiece interface | Hau-Yi Hsiao, Kuo-Ming Wu, Sheng-Chau Chen | 2025-01-21 |
| 12198931 | Ion implantation method for reducing roughness of patterned resist lines | Wei-Ting Chien, Liang-Yin Chen, Huicheng Chang, Yee-Chia Yeo | 2025-01-14 |
| 12191174 | Semiconductor processing tool and method of using an embedded chamber | Chia-Cheng Chen, Chih-Kai Yang, Wei-Ting Chien, Liang-Yin Chen, Huicheng Chang +1 more | 2025-01-07 |