Issued Patents 2025
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12354873 | System and method for multiple step directional patterning | Chih-Kai Yang, Yu-Tien Shen, Hsiang-Ming CHANG, Chun-Yen Chang, Ya Hui Chang +2 more | 2025-07-08 |
| 12317524 | Semiconductor device and method | Chia-Ling Chan, Liang-Yin Chen | 2025-05-27 |
| 12293924 | Ion exposure method and apparatus | Chia-Cheng Chen, Liang-Yin Chen, Huicheng Chang, Yee-Chia Yeo | 2025-05-06 |
| 12198931 | Ion implantation method for reducing roughness of patterned resist lines | Chun-Liang Chen, Liang-Yin Chen, Huicheng Chang, Yee-Chia Yeo | 2025-01-14 |
| 12191174 | Semiconductor processing tool and method of using an embedded chamber | Chia-Cheng Chen, Chih-Kai Yang, Chun-Liang Chen, Liang-Yin Chen, Huicheng Chang +1 more | 2025-01-07 |