Issued Patents 2025
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12400874 | Processing method, method of manufacturing semiconductor device, processing apparatus, and recording medium | Kimihiko NAKATANI, Takashi Nakagawa, Takayuki Waseda, Yoshitomo HASHIMOTO | 2025-08-26 |
| 12381091 | Method of processing substrate, method of manufacturing semiconductor device, recording medium, and substrate processing apparatus | Kimihiko NAKATANI, Ryota Ueno, Takashi Nakagawa, Yoshitomo HASHIMOTO, Yoshiro Hirose | 2025-08-05 |
| 12374544 | Processing method, method of manufacturing semiconductor device, processing apparatus, and recording medium | Shoma Miyata, Kimihiko NAKATANI, Takayuki Waseda, Takashi Nakagawa | 2025-07-29 |
| 12283476 | Method of manufacturing semiconductor device, substrate processing apparatus and non-transitory computer-readable recording medium | Hiroshi Ashihara, Takayuki Waseda | 2025-04-22 |
| 12278103 | Method of processing substrate and method of manufacturing semiconductor device by forming film | Takayuki Waseda, Takashi Nakagawa, Kimihiko NAKATANI, Takao Izaki, Yoshitomo HASHIMOTO | 2025-04-15 |