Issued Patents 2025
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12424463 | Method of processing substrate, method of manufacturing semiconductor device, substrate processing system, and recording medium | Kimihiko NAKATANI, Shoma Miyata, Yoshitomo HASHIMOTO | 2025-09-23 |
| 12400874 | Processing method, method of manufacturing semiconductor device, processing apparatus, and recording medium | Motomu DEGAI, Kimihiko NAKATANI, Takashi Nakagawa, Yoshitomo HASHIMOTO | 2025-08-26 |
| 12374544 | Processing method, method of manufacturing semiconductor device, processing apparatus, and recording medium | Shoma Miyata, Kimihiko NAKATANI, Takashi Nakagawa, Motomu DEGAI | 2025-07-29 |
| 12283476 | Method of manufacturing semiconductor device, substrate processing apparatus and non-transitory computer-readable recording medium | Hiroshi Ashihara, Motomu DEGAI | 2025-04-22 |
| 12283478 | Processing method, method of manufacturing semiconductor device, processing apparatus, and recording medium | Yoshitomo HASHIMOTO, Kimihiko NAKATANI | 2025-04-22 |
| 12278103 | Method of processing substrate and method of manufacturing semiconductor device by forming film | Takashi Nakagawa, Kimihiko NAKATANI, Motomu DEGAI, Takao Izaki, Yoshitomo HASHIMOTO | 2025-04-15 |