Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12278103 | Method of processing substrate and method of manufacturing semiconductor device by forming film | Takayuki Waseda, Takashi Nakagawa, Kimihiko NAKATANI, Motomu DEGAI, Yoshitomo HASHIMOTO | 2025-04-15 |