Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12381091 | Method of processing substrate, method of manufacturing semiconductor device, recording medium, and substrate processing apparatus | Kimihiko NAKATANI, Motomu DEGAI, Takashi Nakagawa, Yoshitomo HASHIMOTO, Yoshiro Hirose | 2025-08-05 |