Issued Patents 2025
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12392031 | Method of processing substrate, substrate processing apparatus, recording medium, and method of manufacturing semiconductor device | Yoshitomo HASHIMOTO, Kimihiko NAKATANI | 2025-08-19 |
| 12381091 | Method of processing substrate, method of manufacturing semiconductor device, recording medium, and substrate processing apparatus | Kimihiko NAKATANI, Ryota Ueno, Motomu DEGAI, Takashi Nakagawa, Yoshitomo HASHIMOTO | 2025-08-05 |
| 12315719 | Substrate processing method, method of manufacturing semiconductor device, non-transitory computer-readable recording medium and substrate processing apparatus | — | 2025-05-27 |