Issued Patents 2025
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12406843 | Method of manufacturing semiconductor device, method of processing substrate, substrate processing apparatus, and recording medium | Kazuhiro Harada, Shintaro Kogura, Shogo Otani, Yoshitomo HASHIMOTO | 2025-09-02 |
| 12266522 | Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording medium | Kazuyuki Okuda, Syuzo SAKURAI, Yasuhiro Inokuchi | 2025-04-01 |
| 12195848 | Method of cleaning, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Kazuhiro Harada, Shingo NOHARA, Yuji Urano, Yasunobu Koshi | 2025-01-14 |