Issued Patents 2025
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12406843 | Method of manufacturing semiconductor device, method of processing substrate, substrate processing apparatus, and recording medium | Masayoshi Minami, Shintaro Kogura, Shogo Otani, Yoshitomo HASHIMOTO | 2025-09-02 |
| 12351908 | Substrate processing method, recording medium, and substrate processing apparatus | Takeo Hanashima | 2025-07-08 |
| 12217959 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Kimihiko NAKATANI, Tsukasa Kamakura, Hajime Karasawa | 2025-02-04 |
| 12195848 | Method of cleaning, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Shingo NOHARA, Yuji Urano, Yasunobu Koshi, Masayoshi Minami | 2025-01-14 |