Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12288683 | Method of manufacturing semiconductor device, substrate processing method, non-transitory computer-readable recording medium and substrate processing apparatus | Kazuyuki Okuda, Yoshitomo HASHIMOTO, Katsuyoshi Harada | 2025-04-29 |
| 12195848 | Method of cleaning, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Kazuhiro Harada, Shingo NOHARA, Yuji Urano, Masayoshi Minami | 2025-01-14 |